Method of producing extreme ultraviolet and / or soft x-ray radiation

摘要

The present invention relates to a method for producing extreme ultraviolet and / or soft X-radiation, in which a liquid target material containing gadolinium and / or terbium is irradiated by irradiation with energetic radiation and / or by a high current discharge in a plasma state gadolinium and / or terbium ions emit extreme ultraviolet and / or soft x-rays. The method is characterized in that the gadolinium and / or terbium or a compound containing the gadolinium and / or terbium are provided in the form of particles in a carrier liquid supplied as a target material and the gadolinium and / or terbium in a low concentration of ≤ 20% by weight. In this way, EUV radiation can be generated in the wavelength range around 6-7 nm with less technical effort.