METHOD AND DEVICE FOR PRODUCING EXTREME ULTRAVIOLET RADIATION OR SOFT X-RAY RADIATION

摘要

The device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprises a laser source (12) for producing a laser radiation (11) which is focused to intensities beyond 106 W/cm² onto a target to produce a plasma and electrodes mounted on an electrically insulating block (6) and located around the path of the plasma produced by the laser source (12). The electrodes are combined with a device for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.