MICROMOTOR, PARTICULARLY USED FOR ADJUSTING POSITIONS, MINIATURE MOTOR FORMED WITH SUCH MICROMOTORS AND MANUFACTURING METHOD.

摘要

The engine (1) has a combustion chamber (2) made of a substrate (3), which is formed of silicon or silicon-carbide and sapphire. A resistance heater is attached to a catalyzer (7) for decomposing of fuel provided in the combustion chamber. The heater is used for heating substrate material sections to a preset temperature or a temperature range, where the material sections are optionally made of substrate material and form the catalyzer. The combustion chamber volume is limited by a covering layer of the chamber, where the layer is made of silicon-on insulator (SOI)-wafer. An independent claim is also included for a method for manufacturing the micro engine.