CASCADED ADAPTIVE FILTERS FOR ATTENUATING NOISE IN A FEEDBACK PATH OF A FLOW CONTROLLER

摘要

An electronics with cascaded adaptive filters for attenuating noise in a feedback path of a flow controller is provided. The electronics includes a signal processor configured to receive a flow signal from a flow sensor, the flow sensor being configured to measure a flow rate of the pulsating flow, generate a noise reference signal from the flow signal and generate a flow rate signal using the noise reference signal. The electronics also includes a controller communicatively coupled to the signal processor, the controller being configured to generate a flow rate control signal using the flow rate signal, and a signal generator communicatively coupled to the controller. The signal generator is configured to receive the flow rate control signal, generate a valve signal based on the flow rate control signal, and provide the valve signal to a valve to control the flow rate of the pulsating flow.