CASCADED ADAPTIVE FILTERS FOR ATTENUATING NOISE IN A FEEDBACK PATH OF A FLOW CONTROLLER

摘要

An electronics (100, 400) with cascaded adaptive filters for attenuating noise in a feedback path of a flow controller is provided. The electronics (100, 400) includes a signal processor (110, 410) configured to receive a flow signal (220a) from a flow sensor (220), the flow sensor (220) being configured to measure a flow rate of the pulsating flow, generate a noise reference signal (110b, 410b) from the flow signal (220a) and generate a flow rate signal (110a, 410a) using the noise reference signal (110b, 410b). The electronics (100, 400) also includes a controller (120) communicatively coupled to the signal processor (110), the controller (120) being configured to generate a flow rate control signal (120a) using the flow rate signal (110a, 410a), and a signal generator (130) communicatively coupled to the controller (120). The signal generator (130) is configured to receive the flow rate control signal (120a), generate a valve signal (130a) based on the flow rate control signal (120a), and provide the valve signal (130a) to a valve (210) to control the flow rate of the pulsating flow.