TITANIUM ALUMINUM NITRIDE HARD FILM, HARD FILM COATED TOOL, METHOD FOR PRODUCING TITANIUM ALUMINUM NITRIDE HARD FILM, AND METHOD FOR PRODUCING HARD FILM COATED TOOL

摘要

A titanium aluminum nitride coating having a columnar crystal structure, which is formed on a substrate, comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix₁, Aly₁)N, wherein x₁ and y₁ are numbers meeting x₁ = 0.005-0.1, and y₁ = 0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix₂, Aly₂)N, wherein x₂ and y₂ are numbers meeting x₂ = 0.5-0.9, and y₂ = 0.5-0.1 by atomic ratio; the high-Al TiAlN being surrounded by the network-like, high-Ti TiAlN.