首页>
外国专利>
TITANIUM ALUMINUM NITRIDE HARD FILM, HARD FILM COATED TOOL, METHOD FOR PRODUCING TITANIUM ALUMINUM NITRIDE HARD FILM, AND METHOD FOR PRODUCING HARD FILM COATED TOOL
TITANIUM ALUMINUM NITRIDE HARD FILM, HARD FILM COATED TOOL, METHOD FOR PRODUCING TITANIUM ALUMINUM NITRIDE HARD FILM, AND METHOD FOR PRODUCING HARD FILM COATED TOOL
A titanium aluminum nitride coating having a columnar crystal structure, which is formed on a substrate, comprises high-Al TiAlN having an fcc structure, which has a composition represented by (Tix 1 , Aly 1 )N, wherein x 1 and y 1 are numbers meeting x 1 = 0.005-0.1, and y 1 = 0.995-0.9 by atomic ratio, and network-like, high-Ti TiAlN having an fcc structure, which has a composition represented by (Tix 2 , Aly 2 )N, wherein x 2 and y 2 are numbers meeting x 2 = 0.5-0.9, and y 2 = 0.5-0.1 by atomic ratio; the high-Al TiAlN being surrounded by the network-like, high-Ti TiAlN.
展开▼