SUBSURFACE ATOMIC FORCE MICROSCOPY WITH GUIDED ULTRASOUND WAVES

摘要

Methods and systems for subsurface imaging of nanostructures buried inside a plate shaped substrate. An ultrasonic generator (30) at a side face (10b) of the substrate (10) is used to couple ultrasound waves (W) into an interior of the substrate (10). The interior comprises or forms a waveguide (10g) for propagating the ultrasound waves (W) in a direction (X) along a length of the substrate (10) transverse to the side face (10b). The nanostructures (10n) are imaged using an AFM tip (21) to measure an effect (E) at the top surface (10a) caused by direct or indirect interaction of the ultrasound waves (W) with the buried nanostructures (10n).