PRESSURE-SENSITIVE ELEMENT, PRESSURE SENSOR, AND METHOD FOR MANUFACTURING PRESSURE-SENSITIVE ELEMENT

摘要

Provided is a pressure sensing element capable of demonstrating a good initial detection sensitivity both in the flat state and the bent state, and is prevented from causing short-circuiting in the initial state; a pressure sensor equipped with the pressure sensing element; and a method of manufacturing a pressure sensing element.;A pressure sensing element (100) includes a support substrate (11); a sensor electrode (12) supported by the support substrate (11); a pressure sensing film (14) functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (12); and an insulating layer (13) which keeps the sensor electrode (12) and the pressure sensing film (14) apart from each other by a predetermined distance A, and has formed therein an opening (20) in which the sensor electrode (12) is exposed to the pressure sensing film (14), the insulating layer (13) having an aperture wall (13b) which partitions the opening (20), and an aperture end (top aperture end (13a)) faced to the pressure sensing film (14), and the insulating layer (13) being increased in height, measured from the support substrate (11), continuously towards the opening (20).