SPECTROSCOPIC MICROSCOPE, AND SPECTROSCOPIC OBSERVATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a spectroscopic microscope and spectroscopic observation method that can efficiently measure a spectrum.SOLUTION: A spectroscopic microscope 100 according to the present embodiment aspect comprises: a light source 11 that generates laser light L1 to be incident upon a sample 37; an edge filter 31 that branches signal light L3 generating in an illumination area 39 illuminated with laser light L2 so as to illuminate a plurality of line-like illumination areas 39 on the sample 37 from light of the same wavelength as that of the laser light L1 of the light source; a multi-slit part 51 that has a plurality of slits through which signal light L4 branched by the edge filter passes, and has the plurality of slits lined in a slit width direction; and spectrometer 60 that disperses the signal light L4 passing through the plurality of slits 53 in a dispersing direction orthogonal to a slit length direction to detect the signal light L4 by a two-dimensional array optical detector 62.SELECTED DRAWING: Figure 2