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SPECTROSCOPIC MICROSCOPE, AND SPECTROSCOPIC OBSERVATION METHOD

机译:光谱显微镜及光谱观察方法

摘要

A spectroscopic microscope (100) according to the present embodiment incudes a light source (11) that generates laser light (L1) that enters a sample (37), in order to illuminate a plurality of linear illumination regions (39) on the sample, an edge filter (31) that branches signal light (L3) generated at the illumination regions (39) illuminated with laser light (L2) from light having the same wavelength as that of the laser light (L1) from the light source, a multi-slit part (51) having a plurality of slits through which signal light (L4) branched by the edge filter passes, the slits being arranged in the slit width direction, and a spectrometer (60) that disperses the signal light (L4) having passed through the slits (53) in the dispersion direction intersecting the slit length direction and detects the signal light (L4) with a two-dimensional array photodetector (62).
机译:根据本实施例的分光显微镜(100)包括光源(11),该光源(11)产生进入样品(37)的激光(L1),以便照射样品上的多个线性照明区域(39),边缘滤光器(31)将在用激光(L2)照射的照明区域(39)处产生的信号光(L3)从与来自光源的激光(L1)具有相同波长的光分支,狭缝部分(51)具有多个狭缝,通过边缘滤波器分支的信号光(L4)穿过多个狭缝,该狭缝沿狭缝宽度方向排列,并且分光器(60)将具有以下特征的信号光(L4)分散:穿过狭缝(53)在与狭缝长度方向相交的色散方向上通过二维阵列光电检测器(62)检测信号光(L4)。

著录项

  • 公开/公告号EP3581899A1

    专利类型

  • 公开/公告日2019-12-18

    原文格式PDF

  • 申请/专利权人 NANOPHOTON CORPORATION;

    申请/专利号EP20180750965

  • 发明设计人 FUJITA KATSUMASA;

    申请日2018-02-01

  • 分类号G01J3/04;G01J3/36;G01N21/27;G01N21/65;G02B21/36;

  • 国家 EP

  • 入库时间 2022-08-21 11:39:09

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