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SPECTROSCOPIC MICROSCOPE, AND SPECTROSCOPIC OBSERVATION METHOD
SPECTROSCOPIC MICROSCOPE, AND SPECTROSCOPIC OBSERVATION METHOD
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机译:光谱显微镜及光谱观察方法
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摘要
A spectroscopic microscope (100) according to the present embodiment incudes a light source (11) that generates laser light (L1) that enters a sample (37), in order to illuminate a plurality of linear illumination regions (39) on the sample, an edge filter (31) that branches signal light (L3) generated at the illumination regions (39) illuminated with laser light (L2) from light having the same wavelength as that of the laser light (L1) from the light source, a multi-slit part (51) having a plurality of slits through which signal light (L4) branched by the edge filter passes, the slits being arranged in the slit width direction, and a spectrometer (60) that disperses the signal light (L4) having passed through the slits (53) in the dispersion direction intersecting the slit length direction and detects the signal light (L4) with a two-dimensional array photodetector (62).
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