SPECTROSCOPIC MICROSCOPE, AND SPECTROSCOPIC OBSERVATION METHOD

摘要

A spectroscopic microscope (100) according to a mode of embodiment of the present invention is provided with: a light source (11) which generates laser light (L1) that is incident on a sample (37); an edge filter (31) which, in order to illuminate a plurality of line-shaped illumination regions (39) on the sample (37), causes signal light (L3) generated in the illumination region (39) illuminated by the laser light (L2) to branch from light having the same wavelength as the laser light (L1) from the light source; a multi-slit unit (51) which has a plurality of slits through which signal light (L4) caused to branch by the edge filter passes, and in which the plurality of slits are aligned in a slit width direction; and a spectroscope (60) which causes the signal light (L4) that has passed through the plurality of slits (53) to disperse in a dispersion direction orthogonal to a slit length direction, and which detects the dispersed signal light (L4) using a two-dimensional array light detector (62).