SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING RECIPE DETERMINATION METHOD AND SUBSTRATE PROCESSING RECIPE DETERMINATION PROGRAM

摘要

PROBLEM TO BE SOLVED: To verify the adequacy of a recipe before performing substrate processing.SOLUTION: A controller 90 controls a plurality of resources 2, 31, 32, V1-V5, V51-V55, V61-V66, V81, V82, FV2, FV4, FV55, FV65, FV66, F2, F4, F51-F55, F61-F66, T31, T32. In a storage unit 92, there is stored a recipe 111 including a plurality of steps describing a processing procedure for processing a substrate. The controller 90 executes substrate processing by controlling the plurality of resources in accordance with the recipe. In the storage unit 92, there is stored service condition data 112 describing a service condition in the course of the same step. The controller 90 determines the propriety of the recipe 111 by checking the processing condition described in each step of the recipe 111 against the service condition data 112 by the time that the controller executes substrate processing.SELECTED DRAWING: Figure 2