The system and method lighted in laser-sustained plasma light source for electrodeless plasma

摘要

A kind of includes to be configured to light one or more of the plasma in the gas being contained in the plasma lamp and light laser for lighting and maintaining the light source of plasma in the plasma lamp of laser-sustained plasma LSP broad band sources. The light source also includes one or more the maintenance lasers for being configured to maintain the plasma. The light source include delivering optical fiber, one or more optical elements, one or more described optical elements be configured to selectively by it is described one or more light laser output and it is described one or more maintain lasers output be coupled to the delivering optical fiber optically.