Development of a collective Thomson scattering system for laser-produced tin plasmas for extreme-ultraviolet light sources

摘要

Spatial profiles of electron density (n_e) and electron temperature (T_e) of laser-produced Sn plasmas for extreme-ultraviolet (EUV) light sources have been obtained using a new collective Thomson scattering system, which has been optimized for the measurement of the ion feature spectrum. The system has an 18 pm spectral resolution, a 5 ns temporal resolution, a 50 urn spatial resolution, and sufficient stray-light rejection near the probing laser wavelength. With this system, measurements of the laser-produced Sn plasmas in the parameter ranges of 3 × 10~(23) ＜ n_e ＜ 10~(25) m~(-3) and 10 ＜ T_e ＜ 20 eV have been performed.