Non-volatile memory (NVM) and high-k and metal gate integration using gate-first method

摘要

A method of making a semiconductor device includes forming a split gate memory gate structure on a memory region of a substrate, and protecting the split gate memory gate structure by depositing protective layers over the memory region including the memory gate structure and over a logic region of the substrate. The protective layers include a material that creates a barrier to diffusion of metal. The protective layers are retained over the memory region while forming a logic gate in the logic region. The logic gate includes a high-k dielectric layer and a metal layer. A spacer material is deposited over the logic gate. Spacers are formed on the memory gate structure and the logic gate. The spacer on the logic gate is formed of the spacer material and the spacer on the memory gate structure is formed with one of the protective layers.