Drive system and drive method, exposure apparatus and exposure method, vibration isolation apparatus and vibration isolation method

摘要

PROBLEM TO BE SOLVED: To perform a precise drive control of a plate stage.SOLUTION: A feedback control system (drive system) is constructed by: a plate interferometer system (interferometer) 18 that measures an amount of control (X) related to a location of a plate stage PST (plate table PTB); a synthesis unit 52 that reproduces the amount of control (X) using model information on the plate stage PST and generates an amount of synthesized control (X) by synthesizing the measurement result (Xn) with a measurement result (X) of the interferometer 18; and a stage control device 50 that gives an amount of operation obtained by using the amount of synthesized control (X) to the plate stage PST (plate stage drive system PSD). Accordingly, even when removing noise of a specific frequency, by reproducing the amount of control (X) to synthesize the measurement result (Xn), a precise drive control of the plate state PST is enabled without losing stability of the control system.