VIBRATION ISOLATION APPARATUS, EXPOSURE APPARATUS USING THE SAME, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vibration isolation apparatus that allows good vibration isolation even from a low frequency.;SOLUTION: If position feedback control is applied to a vibration isolation stand, as to a reference body installed on the vibration isolation stand and subjected to the position feedback control using a PID compensator, the integrator of the PID compensator for the reference body is coupled with the rigidity of a gas spring of the vibration isolation apparatus, and a steep peak is produced in a transfer function from a base to the vibration isolation stand. Therefore, in one embodiment of this invention, a PD compensator is used for a compensator 26 in the position feedback control system of a reference body 24. Or, speed feedback control may be applied to the reference body installed on the vibration isolation stand with respect to an absolute space, or to the base. Thereby, the steep peak is prevented from being produced in the transfer function from the base to the vibration isolation stand.;COPYRIGHT: (C)2012,JPO&INPIT