Stage system for exposure apparatus and device manufacturing method in which a stage supporting member and a countermass supporting member provide vibration isolation

摘要

A stage system includes a stage mechanism having a movable stage and a stage supporting member for carrying the movable stage thereon, and a countermass mechanism having a movable countermass and a countermass supporting member for carrying the countermass thereon, wherein the stage supporting member and the countermass supporting member are supported separately or with vibration isolated.