Small vacuum evaporation apparatus for analysis and analysis method for deposition of vapor deposition film

摘要

PROBLEM TO BE SOLVED: To provide a small-sized vacuum vapor deposition device for analysis and a deposition film analytical method during film formation which can analyze in real time quality of a film during a process of forming a film on a substrate, especially, at the initial process of film formation.SOLUTION: In a small-sized vacuum vapor deposition device 100 for analysis which comprises a vessel 6, a first crucible holder and a second crucible holder arranged at the upper part in the vessel, a substrate support part 5 arranged at the lower part in the vessel, shutters 2a, 2b arranged at each of the plural crucible holders, and a shutter 3 arranged above the substrate support part 5, each of the crucible holders includes a glass-made crucible with an opening arranged below and a resistance heater, and vapor of material inputted into the glass-made crucible is heated by the resistance heater and is diffused to the lower side of the vessel. When the vapor reaches on the substrate 4 arranged at the substrate support part, a film is formed on the substrate.