Object transport apparatus, exposure apparatus, flat panel display manufacturing method, device manufacturing method, object transport method, and exposure method

摘要

The substrate holder (28) can be transferred by holding a part of the substrate (P) located above the substrate holder (28) using the holding pad (84b) and the substrate holder (28). ) When the holding of the other part of the substrate (P) by the substrate carry-in hand (62) holding the other part of the substrate (P) located above the substrate (P) is released, the holding pad (84b) holding the substrate (P) And controlling the drive downward so that the substrate (P) is supported by the support surface of the substrate holder (28). Thereby, the board | substrate conveyance to a board | substrate holder can be performed rapidly.