Object transport apparatus, exposure apparatus, flat panel display manufacturing method, device manufacturing method, object transportation method, and exposure method

摘要

This method for conveying a substrate (P) to a substrate holder (28) involves: using holding pads (84b) to hold a portion of the substrate (P) positioned above the substrate holder (28); and, when the holding of another portion of the substrate (P) by a substrate loading hand (62) for holding the other portion of the substrate (P) positioned above the substrate holder (28) is released, driving and controlling the holding pads (84b) holding the substrate (P) downwards such that the substrate (P) is supported on a support surface of the substrate holder (28). As a result, the substrate can be swiftly conveyed to the substrate holder.