object transport apparatus, object processing apparatus, exposure apparatus, manufacturing method, device manufacturing method of the flat panel display, object transport of methods, and object exchange method

摘要

Substrate loading apparatus (80 for transferring a substrate (P) to the substrate stage (20) ), one end portion of the substrate (P2) and (+ end of the X side) of the vicinity, and the other end (a plurality of load hand the end) the vicinity of the -X side respectively held by suction from below (84), board ( P2) is arranged to face the upper surface of the gas suction device exerts a gravitational direction upward force to the substrate supported on a plurality of load hand (84) (P2) and (86), multiple load hand (84 ) and I provided with a gas suction device (86) drives the drive system and. This makes it possible to transfer the substrate efficiently.