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Bonding Electrode Structure of Flip-chip LED Chip and Fabrication Method

机译:倒装芯片led芯片的键合电极结构及制作方法

摘要

A bonding electrode structure of a flip-chip LED chip includes: a substrate; a light-emitting epitaxial layer over the substrate; a bonding electrode over the light-emitting epitaxial layer, wherein the bonding electrode structure includes a metal laminated layer having a bottom layer and an upper surface layer from bottom up. The bottom layer structure is oxidable metal and the side wall forms an oxide layer. The upper surface layer is non-oxidable metal. The bonding electrode structure has a main contact portion, and a grid-shape portion surrounding the main contact portion in a horizontal direction. The problems during packaging and soldering of the flip-chip LED chip structure, such as short circuit or electric leakage, can thus be solved.
机译:倒装芯片LED芯片的键合电极结构包括:基板;衬底上的发光外延层;在发光外延层上的键合电极,其中,键合电极结构包括从下到上具有底层和上表面层的金属层压层。底层结构是可氧化的金属,并且侧壁形成氧化物层。上表面层是不可氧化的金属。接合电极结构具有主接触部和在水平方向上包围该主接触部的格子状的部分。从而可以解决倒装芯片LED芯片结构在封装和焊接过程中出现的短路或漏电等问题。

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