首页> 外国专利> X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

X-ray source, high-voltage generator, electron beam gun, rotary target assembly, rotary target, and rotary vacuum seal

机译:X射线源,高压发生器,电子束枪,旋转靶组件,旋转靶和旋转真空密封

摘要

Disclosed herein are a high-voltage generator (120) for an x-ray source, an x-ray gun, an electron beam apparatus, a rotary vacuum seal, a target assembly for an x-ray source, a rotary x-ray emission target (500), and an x-ray source. These various aspects may separately and/or together enable the construction of an x-ray source which can operate at energies of up to 500 kV and beyond, which is suitable for use in commercial and research x-ray applications such as computerized tomography. In particular, the high-voltage generator includes a shield electrode (123a, 123b) electrically connected intermediate of a first voltage multiplier (122a, 122b) and a second voltage multiplier (122b, 122c). The electron beam apparatus includes control photodetectors (202a, 202b—not shown) and photo emitters (201a, 202a) having a transparent conductive shield (203a and 203b, 203c—not shown) arranged therebetween. The rotary vacuum seal includes a pumpable chamber (302) at a position intermediate between high-pressure and low-pressure ends of a bore (301) for a rotating shaft (401). The rotary target assembly is configured such that when a torque between a bearing housing (403) and a vacuum housing exceeds a predetermined torque, the bearing housing rotates relative to the vacuum housing. The rotary x-ray emission target (500) has a plurality of target plates (560) supported on a hub, the plates being arranged on the hub to provide an annular target region about an axis rotation of the hub. The x-ray gun is provided with a shield electrode (123a) maintained at a potential difference relative to the x-ray target different to the electron beam emission cathode.
机译:本文公开了用于X射线源的高压发生器( 120 ),X射线枪,电子束设备,旋转真空密封件,用于X射线源的靶组件。 ,旋转X射线发射目标( 500 )和X射线源。这些各个方面可以分别和/或一起使得能够构造能够以高达500kV及更高的能量操作的x射线源,其适合用于商业和研究的x射线应用,例如计算机断层摄影。特别地,高压发生器包括电连接在中间的屏蔽电极( 123 a, 123 b )第一电压倍增器( 122 a, 122 b )和第二电压倍增器( 122 b, 122 c )。电子束设备包括控制光电探测器( 202 a, 202 b -未显示)和光电发射器(< B> 201 a, 202 a )具有透明的导电屏蔽( 203 203 b, 203 c (未显示)之间。旋转真空密封件在位于旋转轴( B> 301 )的孔( 301 )的高压端和低压端之间的中间位置处包括一个可泵送腔( 302 )。 B> 401 )。旋转靶组件被构造成使得当轴承壳体( 403 )与真空壳体之间的转矩超过预定转矩时,轴承壳体相对于真空壳体旋转。旋转X射线发射目标( 500 )具有支撑在轮毂上的多个目标板( 560 ),这些板布置在轮毂上以提供环形目标围绕轮毂的轴线旋转的区域。 X射线枪设有屏蔽电极( 123 a ),该屏蔽电极相对于不同于电子束发射阴极的X射线靶保持在电位差。

著录项

  • 公开/公告号US10096446B2

    专利类型

  • 公开/公告日2018-10-09

    原文格式PDF

  • 申请/专利权人 NIKON METROLOGY NV;

    申请/专利号US201414774424

  • 发明设计人 ROGER HADLAND;

    申请日2014-03-12

  • 分类号H01J35/04;H01J35/02;H01J35/10;H02M7/10;H05G1/12;H02M1/32;F16C33/76;F16C35/04;F16J15/16;H01J29/48;H01J35/16;H01J35/06;H01J37/065;

  • 国家 US

  • 入库时间 2022-08-21 13:03:29

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