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Wafer Carrier, Method for Manufacturing the Same and Method for Carrying a Wafer
Wafer Carrier, Method for Manufacturing the Same and Method for Carrying a Wafer
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机译:晶圆载具,其制造方法以及晶圆载带方法
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摘要
A wafer carrier comprises a first foil, a second foil, and a chamber between the first and the second foil. The first foil has a perforation and is used for carrying the wafer. The first and the second foil are connected to each other so as to form the chamber. The chamber is configured to be evacuated to form a vacuum in the chamber, the vacuum causes an underpressure at the perforation, the underpressure forms a carrying force to the wafer to be carried.
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