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Semiconductor device with a termination mesa between a termination structure and a cell field of field electrode structures
Semiconductor device with a termination mesa between a termination structure and a cell field of field electrode structures
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机译:在终端结构和场电极结构的单元场之间具有终端台面的半导体器件
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摘要
A semiconductor device includes a cell field with a plurality of field electrode structures and cell mesas. The field electrode structures are arranged in lines. The cell mesas separate neighboring ones of the field electrode structures from each other. Each field electrode structure includes a field electrode and a field dielectric separating the field electrode from a semiconductor body. A termination structure surrounds the cell field, extends from a first surface into the semiconductor body, and includes a termination electrode and a termination dielectric separating the termination electrode from the semiconductor body. The termination and field dielectrics have the same thickness. A termination mesa, which is wider than the cell mesas, separates the termination structure from the cell field.
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