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Sensor device, image sensor array and manufacturing method of sensor device
Sensor device, image sensor array and manufacturing method of sensor device
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机译:传感器装置,图像传感器阵列以及传感器装置的制造方法
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摘要
A sensor device is disclosed. The sensor device include: a detector having a contact formation region; an insulating layer disposed over the detector; a conductive pad disposed over the insulating layer opposite to a side of the detector; a contact plug formed in the insulating layer for electrically coupling the contact implant region and the conductive pad; and a read-out integrated circuit bonded to the insulating layer through the conductive pad. An image sensor array and a manufacturing method of a sensor device are also disclosed.
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