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Sensor device, image sensor array and manufacturing method of sensor device

机译:传感器装置,图像传感器阵列以及传感器装置的制造方法

摘要

A sensor device is disclosed. The sensor device include: a detector having a contact formation region; an insulating layer disposed over the detector; a conductive pad disposed over the insulating layer opposite to a side of the detector; a contact plug formed in the insulating layer for electrically coupling the contact implant region and the conductive pad; and a read-out integrated circuit bonded to the insulating layer through the conductive pad. An image sensor array and a manufacturing method of a sensor device are also disclosed.
机译:公开了一种传感器装置。该传感器装置包括:具有接触形成区域的检测器;绝缘层设置在检测器上方;导电垫设置在绝缘层上与检测器相对的一侧;接触塞形成在绝缘层中,用于将接触注入区和导电焊盘电耦合。读出集成电路通过导电焊盘与绝缘层结合。还公开了图像传感器阵列和传感器装置的制造方法。

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