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Semiconductor package with Pillar-Top-Interconnection (PTI) configuration and its MIS fabricating method

机译:具有柱顶互连(PTI)配置的半导体封装及其MIS制造方法

摘要

Disclosed is a semiconductor package with Pillar-Top-Interconnection (PTI) configuration, comprising a redistribution layer (RDL) formed on a carrier plane, a plurality of metal pillars disposed on the RDL, a chip bonded onto the RDL, and a molding core. The molding core is formed on the carrier plane and has a bottom surface defined by the carrier plane so that the RDL is embedded inside the molding core. The package thickness of the molding core is greater than the chip-bonding height of the chip so that the chip is completely embedded inside the molding core. The metal pillars are encapsulated at the peripheries of the molding core with a plurality of pillar top portions exposed from the molding core. The exposed pillar top portions are reentrant from a top surface of the molding core and uneven. Accordingly, it realizes the effects of ultra-thin and smaller footprint POP stacked assembly with fine pitch vertically electrical connections in POP structure. Also, it is possible to achieve zero spacing between POP stacked assembly.
机译:公开了一种具有柱顶互连(PTI)配置的半导体封装,包括形成在载体平面上的重分布层(RDL),布置在RDL上的多个金属柱,结合到RDL上的芯片以及模制芯。模制芯形成在载体平面上并且具有由载体平面限定的底表面,使得RDL嵌入在模制芯内部。成型芯的封装厚度大于芯片的芯片结合高度,从而使芯片完全嵌入成型芯内部。金属柱被封装在模制芯的外围,并且多个柱顶部从模制芯暴露。暴露的柱顶部从模制芯的顶表面凹入并且不平坦。因此,它实现了在POP结构中具有细间距垂直电连接的超薄,更小尺寸的POP堆叠组件的效果。而且,有可能在POP堆叠组件之间实现零间距。

著录项

  • 公开/公告号US9825005B2

    专利类型

  • 公开/公告日2017-11-21

    原文格式PDF

  • 申请/专利权人 POWERTECH TECHNOLOGY INC.;

    申请/专利号US201514960962

  • 发明设计人 HUNG-HSIN HSU;YUN-HSIN YEH;

    申请日2015-12-07

  • 分类号H01L25/04;H01L23/31;H01L23/48;H01L25/065;H01L23/00;H01L23/498;H01L21/683;H01L25/00;H01L21/48;H01L21/56;H01L25/10;

  • 国家 US

  • 入库时间 2022-08-21 12:55:23

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