首页> 外国专利> ELECTROCHEMICAL MIGRATION PREVENTIVE ADDITIVE FOR COPPER AND METHOD FOR PREVENTING ELECTROCHEMICAL MIGRATION BY USING SAME

ELECTROCHEMICAL MIGRATION PREVENTIVE ADDITIVE FOR COPPER AND METHOD FOR PREVENTING ELECTROCHEMICAL MIGRATION BY USING SAME

机译:铜的电化学迁移预防添加剂和使用相同的方法预防电化学迁移的方法

摘要

According to one embodiment of the present invention, an electrochemical migration preventive additive can suppress electrochemical migration by delaying or preventing the generation or the growth of a dendrite generated between copper metal wirings. Therefore, shorting of a circuit can be ultimately prevented. In addition, when the preventive additive is used by being mixed with an EMC or underfill material of a packaging process of a semiconductor and the like, the reliability of a semiconductor device can be increased.
机译:根据本发明的一个实施方式,一种防止电化学迁移的添加剂可以通过延迟或防止在铜金属布线之间生成的枝晶的生成或生长来抑制电化学迁移。因此,可以最终防止电路短路。另外,当通过与半导体的封装工艺的EMC或底部填充材料混合来使用预防性添加剂时,可以提高半导体器件的可靠性。

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