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LONG TRAVEL AIR BEARING LINEAR STAGE

机译:长途旅行空气轴承线性阶段

摘要

A long travel aerostatic linear stage includes a plurality of rails, a plurality of planar bearing plates, and a plurality of porous media gas bearing. The plurality of planar bearing plates are aligned with and attached to the rails. Each planar bearing plate includes a plurality of metal plates having machined air bearing surfaces. The plurality of porous media gas bearings float on the bearing plates in a non-contact frictionless manner to support a traversing load and control lateral motion of the rails. The rails may include at least one rail which supports the traversing load and at least one rail which controls the lateral motion. The bearing plates are restrained and attached to the rails in a manner that ensures the planar nature of the bearing plates are maintained and the air gap is effective.
机译:长行程空气静力线性工作台包括多个导轨,多个平面轴承板和多个多孔介质气体轴承。多个平面轴承板与轨道对准并附接到轨道。每个平面轴承板包括具有加工的空气轴承表面的多个金属板。多个多孔介质气体轴承以非接触无摩擦的方式漂浮在轴承板上,以支撑横向载荷并控制轨道的横向运动。导轨可包括至少一根支撑横向负载的导轨和至少一根控制横向运动的导轨。轴承板被约束并以确保轴承板的平面特性且气隙有效的方式连接到导轨。

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