cBN MOLDING AND METHOD FOR MANUFACTURING cBN FILM

摘要

[Problem] To provide a cBN molding and a method for manufacturing a cBN film whereby a cBN film having high adhesion between a base material and the cBN film is formed with high efficiency. [Solution] A method for manufacturing a cBN film has a boron layer forming step for forming a boron layer 130 on a substrate 110, a mixed layer forming step for forming a mixed layer 140 containing boron atoms and nitrogen atoms on the boron layer 130, and a cBN film forming step for forming a cBN film 150 on the mixed layer 140. In the boron layer forming step, the mixed layer forming step, and the cBN film forming step, film formation is performed in a state in which a plasma is generated. In the mixed layer forming step, a noble gas, nitrogen gas, and a gas including boron atoms are supplied to the substrate 110. The flow rate of nitrogen gas is increased while the combined total of the flow rate of nitrogen gas and the flow rate of the noble gas is held constant, and a mixed layer 140 in which the ratio of nitrogen atoms increases progressively away from the substrate 110 is formed.