首页> 外国专利> TRANSFER LOCATION-MEASURING TEST DUMMY USED IN SEMICONDUCTOR OR DISPLAY SYSTEM FIELD AND PRECISE TRANSFER MEASURING METHOD USING TRANSFER LOCATION-MEASURING TEST DUMMY USED IN SEMICONDUCTOR OR DISPLAY SYSTEM FIELD

TRANSFER LOCATION-MEASURING TEST DUMMY USED IN SEMICONDUCTOR OR DISPLAY SYSTEM FIELD AND PRECISE TRANSFER MEASURING METHOD USING TRANSFER LOCATION-MEASURING TEST DUMMY USED IN SEMICONDUCTOR OR DISPLAY SYSTEM FIELD

机译:在半导体或显示系统领域中使用的传输位置测试虚拟样本以及在半导体或显示系统领域中使用的传输位置测试虚拟样本的精确传输测量方法

摘要

A disclosed transfer location-measuring test dummy used in a semiconductor or display system field comprises a dummy body, a pinhole image measuring member, a slot image measuring member, and a central processing member. Therefore, the test dummy is advantageous in that the same can measure the height of a slot inside a storage case so as to prevent an object to be sensed from colliding against the slot, and can determine whether the object to be sensed is transferred normally to a location to which the object is to be transferred in a manufacturing device by using a lift pinhole even when a separate reference point is not formed.
机译:在半导体或显示系统领域中使用的公开的转移位置测量测试假人包括假人主体,针孔图像测量构件,缝隙图像测量构件和中央处理构件。因此,该测试假人的优点在于,该测试假人可以测量存储箱内部的狭槽的高度,以防止被感测物体碰撞到该狭缝,并且可以确定该被感测物体是否被正常传送到即使没有形成单独的参考点,也要使用提升针孔在制造设备中将物体转移到的位置。

著录项

  • 公开/公告号WO2018143506A1

    专利类型

  • 公开/公告日2018-08-09

    原文格式PDF

  • 申请/专利权人 2WINTEK INC.;

    申请/专利号WO2017KR02240

  • 发明设计人 SONG MIN SUB;LEE HO JOON;LIM YOUNG SONG;

    申请日2017-03-02

  • 分类号H01L21/67;H01L21/66;H01L21/68;G01R31/26;

  • 国家 WO

  • 入库时间 2022-08-21 12:43:10

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