Test dummy for precision transfer position measurement using the semiconductor system or display system and precision transfer position measurement method using the test dummy

摘要

A precise transfer measurement method using a test dummy for transfer position measurement and a test dummy for transfer position measurement used in the field of semiconductor or display systems is disclosed. And a transfer robot for transferring the detection object of the storage box to the fixing unit is provided. The transfer robot includes a storage unit for storing a detection object, a fixing unit for fixing the detection object, A dummy body which is formed to have the same size as that of the object to be sensed; A pinhole image measuring member capable of recognizing or photographing a plurality of guide pin holes formed in the fixing means; The slots of the storage box disposed at the upper end of the dummy body are measured so that the interval between the slots of the storage box and the dummy body disposed at the upper end of the dummy body is measured while the dummy body is stored in the storage box A slot image measuring member capable of measuring an image; And a central processing unit capable of transmitting the information measured by the pinhole image measuring member or the slot image measuring member to a prepared image processing computer. A precise transfer measurement method using a test dummy for measuring a transfer position includes a target object fixing device including a storage box for storing a detection target object and fixing means for fixing the detection target object, And a plurality of guide pin holes formed in the fixing means are formed on the dummy body and formed in the same size as the size of the detection target body, And a pinhole image measuring member disposed at an upper portion of the dummy body so that a distance between the slot of the storage case disposed at the upper end of the dummy body and the dummy body is measured while the dummy body is stored in the storage case, Of the slot of the RTI ID = 0.0 And a central processing member capable of transmitting the measured information from the pinhole image measuring member or the slot image measuring member to a prepared image processing computer. The method comprising the steps of: (1) placing the test dummy for measuring the transfer position stored in the storage box on the transfer robot; (2) In the step (1), the transfer robot transfers the test dummy for measuring the transfer position to the upper end of the fixing means. (3) In the test dummy for measuring the position of transfer conveyed to the upper end of the fixing means in the step (2), the pin hole image measuring member recognizes or photographs the guide pin hole of the fixing means. (4) transmitting the image recognized or photographed in step (3) to the central processing unit; (5) transmitting the image transmitted to the central processing unit to the image processing computer in step (4); (6) determining whether the test dummy for measuring the transport position can be seated at a predetermined position of the fixing means, with the image transmitted to the image processing computer in the step (5) , The position of the center of the test dummy for measuring the transport position accurately coincides with the center of the guide pin hole can be grasped According to the precision transfer measurement method using the test dummy for the transfer position measurement and the test dummy for the transfer position measurement used in the semiconductor or display system field disclosed in the present invention, a test for checking whether the sensing object can be normally moved The height of the slot can be measured so that the object to be detected does not hit the slot in the storage, and even if a separate reference point is not formed, it is determined whether the object is normally transferred to the position where the object is to be transferred There is an advantage to be able to do.