NOZZLE FOR DISTRIBUTION ASSEMBLY OF MATERIAL VAPOR SOURCE AREAS, METHOD FOR MAKING SOURCE ARRANGEMENT, VACUUM VAPOR DEPOSITION SYSTEM, AND METHOD FOR VAPORING MATERIAL

摘要

A nozzle 100 for connecting to a dispensing assembly for guiding material evaporated from a material source into a vacuum chamber is described. The nozzle includes a nozzle inlet (110) for receiving the evaporated material; A nozzle outlet 120 for discharging the evaporated material to the vacuum chamber; And a nozzle passage 130 extending from the nozzle inlet 110 to the nozzle outlet 120 in the direction of flow 111 and wherein the nozzle passage 130 includes a continuously increasing hole 111 in the flow direction 111, And includes an outlet section 131 having an angle alpha. In addition, a material deposition arrangement with such a nozzle, a vacuum deposition system with material source arrangement, and a method for depositing vaporized material are provided.