the use of the breathing device is put at the MEMS detector in a method and system of the technology, the method and system is MEMS (microelectromechanical systems) detector, through the understanding of breath (human)uc5d0 can cause air flow (air flo w) is the detection stage can be included.the compressed air MEMS detector. the detection bias may include members of the can. the deflection member (deflection) MEMS detector in the west (spacer) through to me.deviation of reflected light signal into two, in the piezoelectric signal (piezoelectric signals), the change in the bias magnetic field, and the generated current can be measured, can be decided. the output signal is based on the detection of the flow can be generated. MEMS detector is the version of the device, and may include members of the MEMS bias can be.board is a ceramic material and / or silicon can contain, in the field of the invention is the bottleneck and the date (interconnects) can be included. with the use of the electric machine can be connected. the air flow is MEMS detector in the milk can be.
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