METHOD FOR MANUFACTURING GRAPHENE NANORIBBON GRAPHENE NANORIBBON METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

摘要

The present invention provides a method for manufacturing graphene nanoribbon, a noble type of graphene nanoribbon, a method for manufacturing a semiconductor device using the method for manufacturing the graphene nanoribbon, and a semiconductor device with improved device characteristics. The method for manufacturing the graphene nanoribbon comprises the steps of forming a graphitized metal catalyst thin film on a substrate; forming a reaction inhibiting layer on the graphitized metal catalyst thin film; and supplying a carbon source to grow the graphene nanoribbon.