METHOD FOR MANUFACTURING GRAPHENE NANORIBBON GRAPHENE NANORIBBON METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE

摘要

The present invention relates to a method of manufacturing a graphene nanoribbon, a graphene nanoribbon, a method of manufacturing a semiconductor device, and a semiconductor device, the method including: forming a graphitized metal catalyst thin film on a substrate; Forming a reaction inhibiting layer on the graphitized metal catalyst thin film; And supplying a carbon source to the graphene nanoribbons to grow graphene nanoribbons, and a method of manufacturing a graphene nanoribbons of a novel shape, a method of manufacturing the graphene nanoribbons, A semiconductor device having improved manufacturing method and device characteristics can be provided.