Lithography Machine and Method for Compensating Surface Profile of a Supporting Frame of a Lithography Machine

摘要

The present invention provides a photolithography apparatus and a method for correcting the surface profile of a hanging box performed by the photolithography apparatus. A hanging box surface correcting unit is provided on the bottom of the hanging box, and correction can be made for the deformation of the hanging box surface. Among the hanging box surface correcting methods, a hanging box surface deformation detecting module detects the deformation of the hanging box surface, and a closed-loop automatic controller controls the correction force of the hanging box surface correcting unit in accordance with the detected deformation of the hanging box surface, thereby allowing more accurate correction on the surface of the hanging box.