A step substrate coating composition comprising a compound having a photo-crosslinking group by unsaturated bond between carbon atoms

摘要

[PROBLEMS] To provide a step-substrate coating composition for forming a film having a filling property and a planarizing property for a pattern. (E) and a solvent (F) containing a partial structure (I) and a partial structure (II), wherein the partial structure (II) is a hydrolyzate produced by the reaction of an epoxy group with a proton- (I) is at least one partial structure selected from the group consisting of the following formulas (1-1) to (1-5), or a partial structure of the formula (1- (2-1) or (2-2), wherein the partial structure (II) is a partial structure composed of a combination of the following formula . In the compound (E), the epoxy group and the hydroxyl group are contained at a molar ratio of 0? (Epoxy group) / (hydroxy group)? 0.5 and the partial structure (II) is 0.01? (Partial structure Partial structure (I) + partial structure (II)) = 0.8.