MASTER OSCILLATORPOWER AMPLIFIER DRIVE LASER WITH PREPULSE FOR EUV LIGHT SOURCE

摘要

Phosphorus And An optical amplifier having a gain band including the gain band; wavelength A pre-pulse seed laser having a tuning module for adjusting a pre-pulse output to a pre-pulse; wavelength A main pulse seed laser for generating a laser output having a first wavelength; And a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.