Development in Gas-Discharge Drive Lasers for LPP EUV Sources

摘要

Development of a drive laser with sufficient output power, high beam quality, and economical cost ofconsumables is critical to the successful implementation of a laser-produced plasma (LPP) EUV source forHVM applications. Cymer has conducted research on a number of solutions to this critical need. We reportour progress on development of a high power system using two gas-discharge power amplifiers andrepetition rates exceeding 10 kHz to produce more than 2kW output power with high beam quality. Weprovide optical performance data and design features of the drive laser as well as a path to output powerscaling to meet high volume manufacturing requirements