Master oscillator—power amplifier drive laser with pre-pulse for EUV light source

摘要

A device is described herein which may comprise an optical amplifier having a gain band including wavelengths λ₁ and λ₂, with λ₁≠λ₂; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength λ₁; a main pulse seed laser generating a laser output having wavelength, λ₂; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.