Cl2 F2 Measuring High Concentration F2 Gas Using Different Cross Sensitivity Cl2 EC Sensors

摘要

The present invention is directed to solve a problem that a measurement range is extremely limited in a case where a gas is not allowed even when a minute amount of the gas is provided, because only a sensor for measuring a minute amount of gas is commercialized in an environmental measurement. Particularly, in a case of an F_2 sensor, since only a very small amount of F_2 exists in an atmosphere, a commercial sensor for measuring a concentration of 1 ppm or more is unable to be found. Using the sensor at higher concentrations does not guarantee a sensor lifespan or accuracy, so that the sensor becomes unavailable for continuous use. To solve the problems described above, an objective of the present invention is to provide an apparatus and a method for measuring concentrations of a plurality of gases from a plurality of mixed gases by using a plurality of sensors having different cross sensitivities for different gases. More specifically, a method of measuring concentrations of Cl_2 and F_2 gases in a mixed gas by using a Cl_2 sensor having a cross sensitivity of 1:1 for the Cl_2 and F_2 gases, and a Cl_2 sensor having a cross sensitivity of 1:0.4 for the Cl_2 and F_2 gases is defined using a following expression. Euro-Gas Cl_2 Sensor 1:1 (F_2:Cl_2) Sensoric Cl_2 Sensor 0.4:1 (F_2:Cl_2)