MoS2-TiN Preparing method of MoS2-TiN thin film for improved electrochemical performance of lithium ion battery

摘要

The present invention relates to a method for manufacturing a MoS_2-TiN thin film electrode for enhanced electrochemical performance of a lithium ion battery. More specifically, provided is a method for manufacturing a MoS_2-TiN thin film electrode for enhanced electrochemical performance of a lithium ion battery. The method comprises the following steps: preparing a molybdenum disulfide (MoS_2) target, a titanium nitride (TiN) target, and a base material; arranging the MoS_2 target and the TiN target to be separated from each other in a multiple sputtering apparatus; and forming an MoS_2-TiN thin film in a state that MoS_2 is mixed with TiN on the base material by applying high frequency power (R.F power) to the MoS_2 target and the TiN target under an atmosphere of inert gas. The MoS_2-TiN thin film electrode, manufactured according to method of the present invention, can prevent change of a volume of MoS_2 by TiN and thus can exhibit a high capacity maintaining rate compared to an initial capacity. In addition, the MoS_2-TiN thin film electrode can provide enhanced electrochemical performance of a lithium ion battery.