Zn1-xMgxO (x = 0, 0.18) thin films were fabricated on the copper substrates by radio-frequency magnetron sputtering using the high pure argon as a sputtering gas. The Zn1-xMgxO films were characterized by X-ray powder diffraction (XRD), scanning electron microscope (SEM) and galvanostatic tests. The electrochemical test showed an improved electrochemical performance of Zn0.82Mg0.18O thin film as an anode material for lithium ion batteries.
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