Method for manufacturing thin silicone wafer by hydrongen hellium co-implantation

摘要

The present invention relates to a solar cell and, more particularly, to a method of manufacturing a thin silicon substrate. Hydrogen and helium ions are implanted into a silicon wafer by the co-implantation of hydrogen and helium. Heat treatment is performed to fabricate a thin silicon substrate by texturing a solar cell according to a crack propagated onto the silicon wafer.