X METHOD FOR PRODUCING METAL OXIDE FILM METAL OXIDE FILM THIN-FILM TRANSISTOR DISPLAY DEVICE IMAGE SENSOR AND X-RAY SENSOR

摘要

The present invention provides a process for producing a metal oxide precursor film, comprising: coating a solution containing a metal nitrate on a substrate and drying the coating film to form a metal oxide precursor film; and a step of irradiating the metal oxide precursor film with light of 10 mW / cm²And a step of irradiating the metal oxide precursor film with a metal oxide film by irradiating the metal oxide precursor film with ultraviolet rays containing at least two peak components. The metal oxide film thus produced and the device including the same are provided.;