X METHOD FOR PRODUCING METAL OXIDE FILM METAL OXIDE FILM THIN-FILM TRANSISTOR DISPLAY DEVICE IMAGE SENSOR AND X-RAY SENSOR

摘要

The present invention provides a process for producing a metal oxide precursor film comprising the steps of applying a solution containing a metal nitrate on a substrate, drying the coating film to form a metal oxide precursor film, and repeating the above-mentioned metal oxide precursor film to a metal oxide film alternately two or more times Wherein at least two steps of dialing the metal oxide precursor film to the metal oxide film are performed so that the maximum reaching temperature of the substrate is 120C or higher and 250C or lower and the metal oxide precursor film is brought into contact with the metal oxide film A method of manufacturing a metal oxide film for telephone, and a metal oxide film and a device including the same are provided.