METHOD FOR PRODUCING SPUTTERING COMPOSITE TARGET CONTAINING HEUSLER ALLOY PHASE OF CO₂FeSi

摘要

FIELD: metallurgy.;SUBSTANCE: method involves mechanical mixing of powders of Co₂FeSi Heusler alloy components, sintering-pressing of produced mixture by means of electro-impulse plasma at 600°c and minimum pressure of 2.5 kN. Sintering is carried out by passing series of direct current pulses up to 5 kA with pulse duration 3.3 ms by filling powder mixture to produce a compact. After this, the produced compact is melted in quartz crucible of induction furnace at 1300°C for 3 hours till complete melting to produce a homogenised ingot. The produced ingot is crushed and ground to produce particles of 1-200 mcm size, and sintering-pressing of composite target is carried out by electro-impulse plasma sintering method with dilatometric shrinkage curve control.;EFFECT: production of homogenised mechanically strong composite target of specified geometry containing Heusler alloy phase of stoichiometric composition.;7 cl, 4 dwg